发明名称 |
ELASTOMERISCHE MIKROPUMPEN- UND MIKROVENTILSYSTEME |
摘要 |
A method of fabricating an elastomeric structure for a micropump or valve comprising: forming a first elastomeric layer on top of a first micromachined mold (10), the first micromachined mold (10) having a first raised protrusion (11) which forms a first recess (21) extending along a bottom surface of the first elastomeric layer (20); forming a second elastomeric layer (22) on top of a second micromachined mold, the second micromachined mold having a second raised protrusion (13) which forms a second recess (23) extending along a bottom surface of the second elastomeric layer, bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel (30) forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate. <IMAGE> |
申请公布号 |
AT215673(T) |
申请公布日期 |
2002.04.15 |
申请号 |
AT20000305389T |
申请日期 |
2000.06.27 |
申请人 |
CALIFORNIA INSTITUTE OF TECHNOLOGY |
发明人 |
UNGER, MARC A.;CHOU, HOU-PU;THORSEN, TODD A.;SCHERER, AXEL;QUAKE, STEPHEN R. |
分类号 |
G03F7/20;B01L3/00;B81B1/00;B81B3/00;B81B7/00;B81C1/00;B81C99/00;C12Q1/68;F04B17/00;F04B35/04;F04B43/04;F15C5/00;F16K7/00;F16K17/02;F16K99/00 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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