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发明名称
METHOD FOR ETCHING SILICON OXYNITRIDE AND DIELECTRIC ANTIREFLECTION COATINGS
摘要
申请公布号
KR20020027323(A)
申请公布日期
2002.04.13
申请号
KR1020017015073
申请日期
2001.11.24
申请人
发明人
分类号
H01L21/3065
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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