FRAGILE SUBSTRATE BREAKING METHOD AND DEVICE THEREFOR

摘要

PURPOSE: A method for breaking a fragile substrate is provided to solve such a problem that the fragile substrate must be inverted when breaking the scribed fragile substrate in a conventional machining system. CONSTITUTION: A closed space covering a region including a scribe line formed on an upper face of a fragile substrate(3) at the center and having a predetermined width is formed. Then, a pressure in the closed space is reduced to break the fragile substrate(3) by curving it slightly into a reverse V shape.