| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device for inspecting chips capable of efficiently inspecting a plurality of chips even when all the chips in one field of view of an observation optical system are not good, and solving a problem attributable to the distortion of the observation optical system. SOLUTION: In this chip inspecting method and the device for inspecting the plurality of chips formed on a surface of a work to be inspected as a fine pattern, one field of view of the observation optical system is divided into a plurality of areas, and predetermined good chips are successively arranged in each area, and image data of the predetermined good chips is incorporated at the position of each area. |
