LITHIUM SECONDARY BATTERY AND MANUFACTURING METHOD OF NEGATIVE ELECTRODE MATERIAL FOR IT

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a negative electrode material at a low temperature of high energy density and good cycle characteristics which is suitable for a lithium secondary battery, especially a thin-film lithium secondary battery. SOLUTION: A tin thin film is formed by a vacuum vapor deposition method using a metal tin as a vapor deposition material under a vacuum condition 10-3-10-7 Torr, with a substrate temperature at 273-573 K. Here, a tin oxide thin film is formed by a CVD method using a tetramethyltin as a tin source while an ozone-contained oxygen as an oxygen source.