| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an aligner which has a stage for accurate positioning but does not have a motor, by using an electron beam as an exposure light source. SOLUTION: An X-Y stage comprises an X actuator 10 including an X guide shaft 11 and an X slider 12 that can travel along the X guide shaft 11, and a Y actuator 20 including a Y guide shaft 21 and a Y slider 22 that can travel along the Y guide shaft 21. Each actuator is composed by forming a pressure chamber between the periphery of the guide shaft and the slider, and at the same time providing a partition wall for dividing the pressure chamber into two cylinder chambers in an axial direction at either the slider or the guide shaft, and allowing compression air to enter or exit the cylinder chamber that has been divided into two portions via supply/delivery passage that is provided in the guide shaft. One guide shaft is connected to the slider of the other guide shaft, thus moving the stage that is fitted to the slider of one guide shaft in the directions of X and Y axes.</p> |
