发明名称 |
PHOTOELECTRIC DEVICE HAVING TRANSPARENT OHMIC CONTACT AND FABRICATING METHOD THEREOF |
摘要 |
PURPOSE: A method for fabricating a photoelectric device having a transparent ohmic contact is provided to form an ohmic contact wherein a contact resistance value is very low and transmissivity is increased by 75 percent, by including a transparent indium-tin-oxide(ITO) layer or Co/ITO layer on a gallium nitride layer formed a specific substrate. CONSTITUTION: The gallium nitride layer is formed on the substrate. A pretreatment process is performed to clean the surface of the gallium nitride layer. The ITO layer is deposited on the pretreated gallium nitride layer. A heat treatment process is performed regarding the substrate having the ITO layer to form an ohmic contact between the gallium nitride layer and the ITO layer. |
申请公布号 |
KR20020026737(A) |
申请公布日期 |
2002.04.12 |
申请号 |
KR20000057980 |
申请日期 |
2000.10.02 |
申请人 |
YEOM, GEUN YOUNG |
发明人 |
KIM, DONG U;LEE, JAE WON;SUNG, YEON JUN;YEOM, GEUN YOUNG |
分类号 |
H01L33/42;(IPC1-7):H01L33/00 |
主分类号 |
H01L33/42 |
代理机构 |
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代理人 |
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