发明名称 PHOTOELECTRIC DEVICE HAVING TRANSPARENT OHMIC CONTACT AND FABRICATING METHOD THEREOF
摘要 PURPOSE: A method for fabricating a photoelectric device having a transparent ohmic contact is provided to form an ohmic contact wherein a contact resistance value is very low and transmissivity is increased by 75 percent, by including a transparent indium-tin-oxide(ITO) layer or Co/ITO layer on a gallium nitride layer formed a specific substrate. CONSTITUTION: The gallium nitride layer is formed on the substrate. A pretreatment process is performed to clean the surface of the gallium nitride layer. The ITO layer is deposited on the pretreated gallium nitride layer. A heat treatment process is performed regarding the substrate having the ITO layer to form an ohmic contact between the gallium nitride layer and the ITO layer.
申请公布号 KR20020026737(A) 申请公布日期 2002.04.12
申请号 KR20000057980 申请日期 2000.10.02
申请人 YEOM, GEUN YOUNG 发明人 KIM, DONG U;LEE, JAE WON;SUNG, YEON JUN;YEOM, GEUN YOUNG
分类号 H01L33/42;(IPC1-7):H01L33/00 主分类号 H01L33/42
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