发明名称 TRANSISTOR AND MANUFACTURING METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To provide a transistor of a low gate voltage which is manufactured without using process at high temperatures. SOLUTION: A thin-film transistor is provided which comprises a gate electrode 2, a gate insulating layer 3, a source electrode 4, a drain electrode 5, and a channel generation semiconductor layer 6 formed on a substrate 1. Here, the gate insulating layer 3 is used as high-dielectricity inorganic compound particles 3-1 which are diffused in an amorphous insulator 3-2.
申请公布号 JP2002110999(A) 申请公布日期 2002.04.12
申请号 JP20000300993 申请日期 2000.09.29
申请人 TOSHIBA CORP 发明人 AOKI SHINYA;KATO RIICHI;HIRAOKA TOSHIRO
分类号 H01L51/05;H01L29/786;H01L51/00;H01L51/30;(IPC1-7):H01L29/786 主分类号 H01L51/05
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