| 摘要 |
PROBLEM TO BE SOLVED: To provide a vaporizer capable of reducing the generation of an unvaporized residue or particles. SOLUTION: Two atomizers 41 and 42 are provided in a vaporizing chamber 43. Liquid materials 4A and 4B having similar vaporizing characteristics are mixed in a mixed state, atomized from the same atomizer 41 and vaporized from a vaporizing surface S12. Meanwhile, a liquid material 4C having different vaporizing characteristics is atomized from-another atomizer 42, and vaporized from a vaporizing surface S11. Temperatures of the surfaces S11 and S12 are respectively independently controlled by temperature regulators 48 and 50, and respectively controlled to temperatures suitable for the materials 4C and 4A, 4B. As a result, partial unvaporization or thermal differentiation of parts of the materials 4A to 4C is reduced, and the generation of the residue is reduced.
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