| 摘要 |
PROBLEM TO BE SOLVED: To create and calibrate a mathematical model for estimating the temperature of an object to be processed. SOLUTION: With respect to heat treatment apparatuses having different thermal characteristics from each other, there are created previously their mathematical models for estimating the temperatures of objects to be processed mounted in their heating furnaces. When manufacturing newly a heat treatment apparatus, it is specified that which heat treatment apparatus of the plural ones whose mathematical models have been prepared previously is analogous to the objective one whose mathematical model is created (step S2). Then, while using the mathematical model of the specified heat treatment apparatus and estimating the temperature of its object to be processed, the heat treatment of its object to be processed is performed (step S4). By measuring the film thickness of a film formed actually (step S5) and by comparing the film thickness with the desired value thereof (step S6), the mathematical model of the specified heat treatment apparatus is modified to perform a desired heat treatment according to the compared result (step S7). By repeating this processing, a fundamental mathematical model is calibrated to create the mathematical model for an individual heat treatment apparatus.
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