LITHOGRAPHIC PROJECTOR, METHOD FOR MANUFACTURING DEVICE AND DEVICE MANUFACTURED THEREBY

摘要

PROBLEM TO BE SOLVED: To provide a means for reducing a damage due to a high-speed ion or the like to a mirror included in a radiation system in a lithographic projector having a plasma radiation source. SOLUTION: A hydrocarbon gas for generating a protective cap layer on the surface of the mirror is supplied to a space for housing a mirror in the lithographic projector. A partial pressure of the hydrocarbon gas in the space is controlled in response to the change of a background pressure in the space and/or the reflectivity of the mirror, and a thickness of the cap layer on the mirror is maintained in an allowable range. When the cap layer and/or an additional multilayer is provided on the mirror to remove sputtering of the upper layer of the mirror, a partial pressure of the hydrocarbon is increased, and a clean surface of the mirror is thereby provided. The used hydrocarbon may be an alcohol. In this case, the generated cap layer is self-finished.