| 摘要 |
PROBLEM TO BE SOLVED: To provide a spin cleaning device, with which the whole of an object to be treated is cleaned with high accuracy and uniformly over the entire range without oscillating the cleaning nozzle, when the object to be cleaned is spun at a high speed for cleaning. SOLUTION: With respect to the spin-cleaning device, which cleans an object to be cleaned 13 by spinning it in a cleaning liquid provided with ultrasonic wave, a nozzle 22 for spraying the cleaning liquid is fixed approximately in the center of the largest turning-radius of the object to be cleaned above the object to be cleaned.
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