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发明名称
SUPPORT DE SUBSTRATS POUR INSTALLATION DE REVETEMENT PAR EVAPORATION
摘要
申请公布号
FR2802947(B1)
申请公布日期
2002.04.12
申请号
FR19990016600
申请日期
1999.12.28
申请人
STMICROELECTRONICS SA
发明人
CANGY YANNICK
分类号
C23C14/50;(IPC1-7):C23C14/50
主分类号
C23C14/50
代理机构
代理人
主权项
地址
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