| 摘要 |
PROBLEM TO BE SOLVED: To prevent a liquid from being scattered from the surface of a substrate, when the corner section of the substrate enters the jet region of air by an air knife nozzle when the substrate is dried by air knife effect. SOLUTION: In the air jet region from the air knife nozzles 20U and 20L provided at upper and lower portions, a rectifying plate 30 is arranged fixedly at a position that is the outside of the conveyance region of the substrate S by a conveyor means 10 and is parallel with a side section Lc facing the corner section Ca entering the air jet region first in the substrate S. The air jetting from nozzle ports 24U and 24L is isolated by the rectifying plate 30, is guided onto the surface of the rectifying plate 30, and is allowed to flow in a rectifying state.
|
