发明名称 SEMICONDUCTOR DEVICE AND ITS BONDING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device where the bonding diameter, having proper bonding strength and proper circularity and proper loop-forming property can be secured simultaneously, even if small balls are used for bonding when bonding with a narrow pitch of 60 μm or smaller, and to provide the bonding method. SOLUTION: In the semiconductor device where a wire is bonded to the electrode on a semiconductor part using ball-bonding method, a bonding wire for a semiconductor implementation where one or more kinds of elements that comprise Ca, Be, noble metal elements and rare-earth elements are contained by 20 to 10,000 wt.ppm in total and the remainders are Au and the unavoidable impurities is used; and by means of bonding method where an initial ball having a diameter 1 to 1.3 times the CD diameter of the capillary used, when the bond wire is connected to an electrode on a semiconductor part is formed on the tip of the wire and then the bond wire is bonded, the ball part of the wire is connected to the electrode.
申请公布号 JP2002110729(A) 申请公布日期 2002.04.12
申请号 JP20000299746 申请日期 2000.09.29
申请人 NIPPON STEEL CORP;NITTETSU MICRO METAL:KK 发明人 TERAJIMA SHINICHI;UNO TOMOHIRO;TATSUMI KOHEI
分类号 C22C5/02;H01L21/60 主分类号 C22C5/02
代理机构 代理人
主权项
地址