发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To avoid short circuiting and to improve yield by preventing the release of a long wiring which does not contact except only one position per cell block as a ground wiring. SOLUTION: A semiconductor device comprises a metal wiring 13, formed on an insulating film (gate oxide film 21, a nitride film 22 and a silicon oxide film 23) formed on a substrate (silicon substrate 11). The semiconductor device further comprises a support contact 20, formed at prescribed intervals between the wiring 13 and the film 12 on the film 12, to ensure adhesive properties thereof.
申请公布号 JP2002110677(A) 申请公布日期 2002.04.12
申请号 JP20000293362 申请日期 2000.09.27
申请人 SONY CORP 发明人 IWABUCHI MAKOTO;YOSHIDA MINORU;ANEZAKI TORU;KONNO YASUHIKO
分类号 H01L23/52;H01L21/3205;H01L21/768;(IPC1-7):H01L21/320 主分类号 H01L23/52
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