| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve the photoelectric conversion characteristics without reducing an open end voltage and a production yield in a thin-film solar battery using such inexpensive substrate as glass. SOLUTION: The solar battery is formed by successively forming one electrode layer 1c, silicon layers 1e, 1f, and 1g having a semiconductor junction section, and the other electrode layer 1h, on a substrate 1a. The substrate 1a is formed by roughening the surface on a side for forming the electrode layers 1c and 1h and the silicon layers 1e, 1f, and 1g by dry etching method. Also, in the surface-roughening method of a solar battery substrate for roughening the surface of the solar battery substrate 1a by the dry etching method, etching is made while etching residue adheres to the surface of the substrate 1a, and then the etching residue is removed.</p> |
