发明名称 HEAT TREATING APPARATUS AND HEAT TREATING METHOD
摘要 PROBLEM TO BE SOLVED: To save energy for water cooling for cooling hot exhaust gas discharged during forced air cooling a heat treating apparatus and relax the water hammer phenomenon when the cooling water is stopped from flowing. SOLUTION: The heat treating apparatus comprises a heat exchanger for cooling hot exhaust gas with water and a closing means for stopping the cooling water from flowing in this order from the upstream of a water passage. The stopping means has an air-operated valve controlled by air pressure to open and close the valve. When a close instruction is sent from a controller to the closing means, compressed air from an air feed source is shut off to hold the air-operated valve open, and a speed controller controls the air escaping rate of the air-operated valve so as to gradually close the valve with taking a predetermined time of 0.5 sec or more.
申请公布号 JP2002110576(A) 申请公布日期 2002.04.12
申请号 JP20000296760 申请日期 2000.09.28
申请人 TOKYO ELECTRON LTD 发明人 YOSHIDA SEIICHI
分类号 F27D17/00;F27D9/00;F27D19/00;H01L21/22;(IPC1-7):H01L21/22 主分类号 F27D17/00
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