| 摘要 |
PROBLEM TO BE SOLVED: To provide a spin treatment device, that can reduce centrifugal force generated at a retention section for retaining a substrate, and the overall inertia moment. SOLUTION: This spin treatment device has a servo control motor 4, a rotor 3 that is rotated and driven by the motor and a toothed wheel 11, that is provided rotatably in the rotor 3, a plurality of movable bodies 17 that have a rack engaging with the toothed wheel and are provided, while the movable bodies can be linearly moved in the tangential-line direction of the toothed wheel by the rotation of the toothed wheel, a first pestle-like member 21 that is provided in each movable body along the movement direction of the movable body and has the retention section 23 for retaining the periphery section of the substrate at one end section, and a coil spring 27 that interlocks the toothed wheel to the rotor, elastically energizes the toothed wheel in a prescribed rotational direction, and moves the movable body, in a direction where the retention section retains the periphery section of the substrate.
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