摘要 |
A current measuring method, which measures a device current flowing through a terminal of a semiconductor device comprises charging the capacitor which is connected between the terminal and an earth potential of the semiconductor device, up to a predetermined voltage; setting the semiconductor device to be in active sate by applying a test pattern to the semiconductor device; measuring a potential of the capacitor at the terminal side after a predetermined test time has elapsed; and judging whether the device current is within a predetermined allowable range, based on the test time, capacitance of the capacitor, and the potential.
|