| 摘要 |
<p>A sensor apparatus that is capable of being mounted on and removed from a stage assembly. The sensor apparatus includes a substrate (402) and one or more sensors (104) that is coupled to the substrate. The sensor apparatus may also include at least one stage assembly connector (414) that couples to the substrate and permits the sensor apparatus to be mounted on a surface (502) of a stage assembly, and at least one manipulator connector (420) coupled to the substrate that permits a manipulation to mount the sensor apparatus on the stage assembly and remove the sensor apparatus from the stage assembly.</p> |
