发明名称 A TESTING DEVICE FOR SEMICONDUCTOR COMPONENTS AND A METHOD OF USING THE DEVICE
摘要 A testing device (10) for semiconductor components and a method of making the device is described. The testing device (10) includes a support structure (20) having an outer edge, and an adhesive film (30) disposed on the support structure (20) to hold a semiconductor wafer (50) in position on the support (20) structure so that neither the adhesive film (30) nor the semiconductor wafer (50) extends beyond the outer edge of the support structure (20). Between the support structure (20) and the adhesive film (30) is a mesh layer (25). A vacuum chuck (42) may be used.
申请公布号 WO0229856(A2) 申请公布日期 2002.04.11
申请号 WO2001US29078 申请日期 2001.09.18
申请人 MOTOROLA, INC. 发明人 NORRIS, MARK, D.;HUGHES, JEFFREY, S.;BROWN, ROY, RUSSELL
分类号 G01R1/04;G01R31/28;H01L21/68;H01L21/683 主分类号 G01R1/04
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