METHODS AND APPARATUS FOR MAINTAINING A PRESSURE WITHIN AN ENVIRONMENTALLY CONTROLLED CHAMBER
摘要
A system including a chamber; (102) a variable speed vacuum pump (204) coupled to the chamber; and a pressure controller (202) coupled to the chamber. The pressure controller (202) compares a set point pressure with a pressure measurement for the chamber and adjusts a flow of gas through the pressure controller based on a difference between the pressure measurement and the set point pressure. The system includes a pressure measurement device coupled (126) to the chamber and to the pressure controller, and a main controller coupled to the variable speed vacuum pump, the pressure controller and the pressure measurement device. The pressure measurement device measures a pressure within the chamber and provides a pressure measurement to the pressure controller and the main controller. The main controller adjusts a speed of the variable speed vacuum pump (204); and provides the set point pressure to the pressure controller.
申请公布号
WO0196972(A3)
申请公布日期
2002.04.11
申请号
WO2001US18992
申请日期
2001.06.13
申请人
APPLIED MATERIALS, INC.;PFEIFFER, KENNETH, E.;VERDICT, GREGORY, S.