| 摘要 |
Two surface acoustic wave paths (11,12,1,2,3,4) are arranged on a carrier (100). A force on the carrier can be detected from the time a surface acoustic wave takes to propagate along the paths. The two SAW paths are arranged in parallel to each other, and have different lengths. The paths may be made from comb-shaped capacitor structures on a piezoelectric material, and reflection barriers (1,2,3,4) arranged on the carrier.
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