Micromechanical membrane used in the production of micromechanical pressure sensors comprises a partially n-doped p-substrate on its surface, and n-epitaxial layers which are p-doped in the membrane region and are arranged on the substrate

摘要

Micromechanical membrane (9) comprises a partially n-doped p-substrate (3) on its surface; and n-epitaxial layers (7, 7') which are p-doped in the membrane region and are arranged on the substrate. An Independent claim is also included for a process for the production of the micromechanical membrane. Preferred Features: An n-doped membrane layer (1) or membrane (1') is arranged on the n-epitaxial layer. The n-epitaxial layers and the membrane layer have different thicknesses. The p-substrate has an etching mask (4) on its side facing outwards.