发明名称 |
Device for converting the intensity distribution of a laser beam and a device and method for generating a laser beam with an intensity which falls constantly along an axis from one side of the beam to the other |
摘要 |
A device is obtained for converting the intensity distribution of a laser beam in particular into an intensity distribution which falls constantly along an axis from one side to the other in that a homogenizer (10), which mutually superimposes the sub-beams of the laser beam such that when a laser beam with a specific intensity distribution passes through the homogenizer, a homogenization of the intensity distribution of the laser beam is promoted, is combined with at least one inverter (24, 26) which inverts the intensity distribution of a sub-region, in particular a sub-beam or a plurality of adjacent sub-beams, along at least one axis along which the intensity is to be converted. The extent of the fall in intensity from one side to the other can be controlled by means of the number of the inverters.
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申请公布号 |
US2002041444(A1) |
申请公布日期 |
2002.04.11 |
申请号 |
US20010960801 |
申请日期 |
2001.09.21 |
申请人 |
KAHLERT HANS-JURGEN;BURGHARDT BERTHOLD |
发明人 |
KAHLERT HANS-JURGEN;BURGHARDT BERTHOLD |
分类号 |
B23K26/06;B23K26/073;B23K101/40;G02B3/00;G02B27/09;G02B27/10;H01L21/20;H01L21/268;H01S3/00;H01S5/00;H01S5/40;(IPC1-7):G02B27/10 |
主分类号 |
B23K26/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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