GAS LASER CHAMBER WITH VERTICAL VIBRATION ISOLATOR

摘要

A chamber/optics support structure (150) for a laser chamber (156) with a vibration source. The chamber and the laser resonance cavity optical elements are supported on a platform. The chamber is supported by a plurality of wheels (1,2,3) which in turn rests on two tracks (158,162). A vertical vibration isolator (182) isolates vertical vibrations originating in the chamber for the laser optics. Flexible clamps (166,168) clamp the chamber in a horizontal position to align it with the resonance cavity optical elements. In a preferred embodiment the plurality of wheels are three, two of which rests in a V-groove track (158) and one which rests on a flat track (162). This embodiment uses two flexible clamps (166,168) each having an adjustment bolt (185) four spaced silicon rubber vibration isolators (182).