发明名称 |
Coordinate measuring system with scanning head for scanning object and base above which is pair of parallel guiding rails and bridge carrier |
摘要 |
The coordinate measuring system is designed so that at least one viscous damper (61,107,55) is provided with a first component (55) coupled at the base (3) and a second component (61) moving together with the guide rail (11), relative to the base (3) in a horizontal direction (x,y). At least one of the supporting rods (61) is supported in a plane (67) parallel to the first extension direction (y) of the guide rail swivelable at the base (3).
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申请公布号 |
DE10147614(A1) |
申请公布日期 |
2002.04.11 |
申请号 |
DE20011047614 |
申请日期 |
2001.09.27 |
申请人 |
CARL ZEISS |
发明人 |
JACOBS, KLAUS;WOLETZ, FRANZ |
分类号 |
G01B5/00;G01B5/008;G01B21/04;(IPC1-7):G01B5/008;G01D11/10 |
主分类号 |
G01B5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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