ORGANIC GLASS FILM AND PATTERN FORMING METHOD FOR THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an organic glass film containing a copolymer of a diallyl carbonate compound and an acid-decomposable allyl carbonate compound and/or an acid-decomposable acrylic ester compound (particularly a monomer forming a hydrophilic group by acid decomposition) and a compound which generates an acid under electron beams and to provide a method for producing a patterned film by patterning the organic glass film with electron beams. SOLUTION: The organic glass film contains a) a copolymer obtained by polymerizing a diallyl carbonate compound of the formula (1) and an acid decomposable allyl carbonate compound and/or an acid decomposable acrylic ester compound and b) a compound which generates an acid under electron beams.