DEVICE AND METHOD FOR FORMING PATTERN DATA, ELECTRONIC PARTS, AND METHOD FOR MANUFACTURING THE PARTS

摘要

PROBLEM TO BE SOLVED: To provide a device for forming pattern data with which the generation of an abnormal shape of pattern due to a connection error arising on a border line between small regions is suppressed. SOLUTION: The device is for forming pattern data used in an exposure process where the whole layout pattern is exposed to light by dividing the layout pattern of electronic parts into plural small regions and individually exposing every small region. The device has at least a pattern data forming part 47 which forms the layout pattern from a circuit pattern and a pattern data verification part 7 which is located across a boundary line of adjacent small regions and detects a pattern having a pattern dimension L not larger than k times the connection error La existing between small regions out of the layout pattern.