发明名称 METHOD FOR DATA PROCESSING OF DESIGN PATTERN OF SEMICONDUCTOR INTEGRATED CIRCUIT AND COMPUTER-READABLE RECORDING MEDIUM WITH DATA PROCESSING PROGRAM RECORDED THEREON
摘要 PROBLEM TO BE SOLVED: To avoid the spreading of an array of small seed cells and to make the hierarchical processing of small single-positioned cells possible, too. SOLUTION: When the size of seed cells to constitute an array is smaller than the threshold, a plurality of seed cells are gathered in the direction where the size of cells is less than the threshold so as to define a new seed cell having a size larger than the threshold (step 203), and an array is again defined as repetition of the newly defined seed cells (step 204).
申请公布号 JP2002107903(A) 申请公布日期 2002.04.10
申请号 JP20000295068 申请日期 2000.09.27
申请人 TOSHIBA CORP 发明人 YAMAMOTO KAZUKO
分类号 G03F1/20;G03F1/68;G06F17/50;H01L21/027;H01L21/82 主分类号 G03F1/20
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