发明名称 PHOTOSENSITIVE COMPOSITION, PHOTOSENSITIVE THIN FILM AND METHOD FOR FORMING PATTERN
摘要 PROBLEM TO BE SOLVED: To provide a photosensitive material and photosensitive thin film each capable of forming patterns without developing step and only with photoirradiation and capable of realizing high sensitivity, and to provide a method for forming patterns using the photosensitive material. SOLUTION: The photosensitive material and the photosensitive thin film each comprise a polymeric material having azobenzene skeleton and a liquid crystal material and the method for forming patterns is characterized by comprising a step, wherein a thin film of photosensitive composition comprising a polymeric material having azobenzene skeleton and a liquid crystal material is formed, and a step, wherein movement of the photosensitive composition is caused by pattern exposure of the thin film.
申请公布号 JP2002105339(A) 申请公布日期 2002.04.10
申请号 JP20000297382 申请日期 2000.09.28
申请人 TOKYO INST OF TECHNOL 发明人 SEKI TAKAHIRO;ICHIMURA KUNIHIRO;UBUKATA TAKASHI
分类号 G03F7/004;C08K5/00;C08L101/02;G03H1/02;G03H1/04;(IPC1-7):C08L101/02 主分类号 G03F7/004
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