| 摘要 |
PROBLEM TO BE SOLVED: To position a specimen by a flock material along its sidewall part, when the specimen is placed on a specimen moving stage so that the specimen is not dislocated by vibration or the like to some extent by a method, wherein the flock material is planted and installed on the surface of the mounting base of the moving stage. SOLUTION: The flock material 81a is planted and installed on the whole surface of the specimen mounting base 81 of the specimen moving stage 80. The flock material 81a is formed, in such a way that Moltopren (R) materials in a prescribed length are bonded uniformly and densely to the whole surface by an electrostatic flocking technique, having elasticity to some extent, and its color is set to black. When the specimen 2 is placed on the mounting base 81, the sidewall part of the specimen 2 is positioned by the erected flock material 81a, and the specimen 2 is not displaced by the vibration or the like to a certain extent. The flock material 81a is black. Even if the mounting base 81 is irradiated with a part of a luminous flux, the greater part of it is absorbed, if when the mounting base 81 is irradiated, and generation of reflected noise light which is harmful to the observation of interference fringes can be prevented.
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