| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor testing device having a unit power supply automatic control function automatically measuring the ripple voltage of each unit power supply and checking whether the ripple voltage is within an allowable limit or not. SOLUTION: This semiconductor testing device is provided with a DC voltage selecting means outputting a selective measurement signal by selecting one of the DC voltages outputted from the unit power supplies after receiving them, a ripple voltage measuring means receiving the selective measurement signal selected by the DC voltage selecting means and measuring the AC ripple voltage component included in the DC voltage, and a ripple voltage judging section controlling the DC voltage selecting means to receive the selective measurement signal corresponding to each unit power supply in sequence, measuring the ripple voltage component included in the DC voltage in sequence with the ripple voltage measuring means, and reporting an abnormality of the unit power supply to a system based on the comparison between the ripple voltage component and a judging threshold value for every unit power supply.
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