| 发明名称 |
ETCHING APPARATUS |
| 摘要 |
PROBLEM TO BE SOLVED: To provide an etching apparatus which can uniformly form micropores for high density wiring boards in a short time. SOLUTION: This etching apparatus which performs a wet etching on a resin film has an ultraviolet irradiation unit.
|
| 申请公布号 |
JP2002105225(A) |
申请公布日期 |
2002.04.10 |
| 申请号 |
JP20000295852 |
申请日期 |
2000.09.28 |
| 申请人 |
TORAY IND INC |
发明人 |
YOKURA MITSUYOSHI;KOKUNI MASAHIRO |
| 分类号 |
C08J7/00;H05K3/00;(IPC1-7):C08J7/00 |
主分类号 |
C08J7/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
