| 摘要 |
PROBLEM TO BE SOLVED: To provide an air-conditioning system that can be calibrated easily, can obtain a stable air volume, can be switched to a nonoperation mode, and can be constructed inexpensively. SOLUTION: This air-conditioning system 71 is provided with an air conditioner 31 equipped with an air a supply fan 41 which supplies air at a variable volume, a supply air duct 53 which connects the air conditioner 31 to clean rooms 45a-45c, and a first HEPA filter 49 which is incorporated in the air conditioner 31 and through which the air sent to the duct 53 is passed. The system 71 is also provided with second HEPA filters 57 which are respectively provided near the air outlets of the rooms 45a-45c and through which the air supplied from the duct 53 is passed, volume dumpers 59 which are respectively provided near the filters 57 and variably adjust the volumes of air-conditioning air blown out from the air outlets 55, and a supply air-side air volume sensor 61 which is installed to the supply air duct 53 and detects the volume of air- conditioning air passed through the duct 53 and the detecting signal of which is used for controlling the air supplying volume of the fan 41. |
