| 摘要 |
PROBLEM TO BE SOLVED: To constitute an apparatus which ensures high positional accuracy for an inspection stage used in an inspecting apparatus, a repairing apparatus or the like, and which is low cost and superior in maintenability. SOLUTION: A movement correction amount, corresponding to moving amount from a stage home position of the inspection stage 12, with a substrate 10 loaded, is stored in a storage device 19 as a recipe to be used, when the substrate 10 is moved. The movement correction amount, corresponding to designated coordinate data, is read out from the storage device 19 for substrates 10 of the same identical kind and is added to the coordinate data. The substrates 10 are moved, in accordance with the coordinate data with the movement correction amount added thereto.
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