| 摘要 |
Gas is passed over a sensor having a diaphragm (4) on which a heating element (5) and temperature sensors (6,7) are arranged. The temperature sensors measure the temperature difference in front of and behind the heating element. In addition, at least a second temperature difference is measured which depends in a different way on the gas flow and on the thickness of the diaphragm. The two temperature differences are used to calculate a measurement signal which depends less on the thickness or dirt accumulation on the membrane. |
