发明名称 |
Apparatus and method for controlling resistivity of ultra pure water |
摘要 |
An apparatus for controlling the resistivity of ultra pure water, including a housing to house a gas permeable membrane, an inlet for untreated ultra pure water which communicates with an ultra pure water path, and an outlet for resistivity-controlled ultra pure water which communicates with the ultra pure water path. The gas permeable membrane divides the interior of the housing into the ultra pure water path and a mixed gas path. A mixed gas is selected from the group consisting of a mixed gas including carbon dioxide and a gas having a lower resistivity controlling ability than carbon dioxide and a mixed gas including ammonia and a gas having a lower resistivity controlling ability than ammonia. The gas permeable membrane is capable of supplying carbon dioxide or ammonia to the untreated ultra pure water at a concentration equal to or more than 90% of the equilibrium concentration. <IMAGE> |
申请公布号 |
EP1195189(A1) |
申请公布日期 |
2002.04.10 |
申请号 |
EP20010122601 |
申请日期 |
2001.09.26 |
申请人 |
DAINIPPON INK AND CHEMICALS, INC. |
发明人 |
KAMBE, TOSHIO;OI, KAZUMI;SAKAI, KAZUNARI;KAWASE, KOJI |
分类号 |
C02F1/68;B01D61/00;B01F3/04;B01F5/04;C02F1/44 |
主分类号 |
C02F1/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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