| 摘要 |
The layered unit 1 includes a first piezoelectric ceramic member 2, a second member 3 placed over the first member, and an adhesive layer 4 formed between the members. A joint surface 2a of the first member to be jointed to the second member is formed with a series of recesses/voids 2p. A sum of the opening areas of the recesses 2p occupies 50% or more relative to a total surface area of the joint surface of the first member. The recesses may be formed by lapping using abrasive grains of silicon carbide, or by grinding using a diamond grain wheel. Alternatively, a series of microprotrusions (12p,Fig.4) may be formed on a crystalline part of a top surface (12a) of a first member (12). The joint surface may be treated with a plasma to form the microprotrusions thereon. An ink jet printhead (Fig. 8) may be formed in a similar manner wherein recesses or protrusions may be formed in a joint surface of a bottom surface (22b) of a piezoelectric member (22p) which is jointed to a base plate 21 or a cover plate 24. The recesses/protrusions provide for increased adhesive strength whilst lowering cell content in the adhesive layer. The techniques may be used in the manufacture of actuators, buzzers, diaphragms, and vibrators.
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