| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor circuit inspecting device capable of finding a trouble at a dynamic operation. SOLUTION: A pattern generator 20 generates a functional test pattern comprising steps of logical data. The functional test pattern is inputted to a reference device 2 and a device under test 4, and both devices 2 and 4 are operated likewise. A comparator 50 compares the dynamic current values flowing in a first ammeter 30 and a second ammeter 40 and outputs a signal when the difference between the current values is a specified value or above. The pattern generator 20 stores a step of logical data which generates the difference of the current values corresponding to the signal from the comparator 50. When the logical state generating the difference of the current values of the specified value or above is reproduced, a surface temperature measuring device 60 measures the temperature distributions of the devices 2 and 4, determines the position data of the portions having different temperatures, and outputs them to a display device 70.
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