摘要 |
PROBLEM TO BE SOLVED: To provide a probe chip adapter which is used together with a measuring probe of low capacity, low in capacity and instance, and replaceable. SOLUTION: Probe chip adapters 70 to 76 are connected to a probing chip 54, extending from the measuring probe 50. Also provided are a conductive element 80, which has a bore at one end and a probing contact formed at the other end and a conductive elastomer which has sufficient tensile strength, compressive strain, hardness, bending force, and elongation and restoration rates, to repeatedly fix the conductive element to the probing chip of the measuring probe.
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