| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and device for inspecting objects to be inspected prior to visual inspections for improving inspection efficiency and accuracy, in which the major section of labor has been conventionally concentrated on finding microdefects in the object to be inspected. SOLUTION: The method for inspecting the object to be inspected prior to visual inspections comprises a flaw signal detecting process for detecting a flaw signal, based on the flaw state of the object to be inspected, a flaw detailed information creating process to create flaw detailed information on the basis of the flaw signal, and a flaw detailed information visualizing process for visualizing the flaw detailed information on the object to be inspected. The method for inspecting the objects to be inspected prior to visual inspections comprises a flaw signal detecting means to detect the flaw signal, based on the flaw state of the object to be inspected, a flaw detailed information creating means to generate flaw detailed information on the basis of the flaw signal, and a flaw detailed information visualizing means for visualizing the flaw detailed information on the object to be inspected.
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