| 摘要 |
PROBLEM TO BE SOLVED: To provide a calibration base board capable of accurately calibrating a predetermined parameter necessary for base board temperature measurement using a radiation thermometer. SOLUTION: In this calibration base board SW, a multilayer film ML is formed on a silicon base 2. The multilayer film ML is formed by alternately laminating a zirconia film having a relatively large refractive index and a silica film having a refractive index smaller than that of the zirconia film. In the multilayer film ML, either of the uppermost layer TML and the lowermost layer film BML is formed of a dielectric film (zirconia film) having the larger refractive index in the two kinds of dielectric films. Among all the dielectric films in the multilayer film ML, an optical film thickness is equalized one another. Using this kind of calibration base board SW, a reflectance of the calibration base board SW becomes a substantially fixed constant over a measurement wavelength area of a measured element in the radiation thermometer, so that the predetermined parameter necessary for measuring a temperature of the base board can be calibrated accurately.
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