发明名称 Method for manufacturing aluminium nitride sintered body in which via hole is made
摘要 A sintered aluminum nitride having satisfactorily densified via holes, which is free from cracking and has excellent appearance, is produced through firing an aluminum nitride molding having at least one highly isolated through-hole for via hole formation. At least one through-hole for formation of dummy via holes not used for electrical connection is formed around the highly isolated through-hole for via hole formation, and the through-hole for dummy via hole formation is also filled with a conductive paste. Thereafter, the aluminum nitride molding is fired into the sintered aluminum nitride.
申请公布号 GB0204486(D0) 申请公布日期 2002.04.10
申请号 GB20020004486 申请日期 2001.05.31
申请人 TOKUYAMA CORPORATION 发明人
分类号 C04B35/581;H01L21/48;H01L23/498;H05K1/03;H05K1/11;H05K3/40 主分类号 C04B35/581
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