| 摘要 |
PROBLEM TO BE SOLVED: To provide a metal CVD apparatus of which the maintainability for removing a product stuck to a gas passing part of a gas box plate is improved and which completely removes the product. SOLUTION: A gas passing member 13 is fitted into a gas passing section of a gas box plate 2 in an upper part of a chamber 1, process gas supplied from an upper gas piping 4 through the gas passing member 13 is introduced into the chamber 1. The gas passing member 13 is freely attached to and detached/separated from the gas box plate 2 and is exchanged with the preliminary and cleaned gas passing member 13 in maintenance. Thereby, a time required for maintenance is shortened, further, because of exchange with the member completely cleaned in advance, dust is not generated, a yield of a product is improved.
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