INTERFEROMETRIC MEASUREMENT OF SURFACES WITH DIFFRACTIVE OPTICS AT GRAZING INCIDENCE,申请号EP19960903557-传众专利搜索

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发明名称	INTERFEROMETRIC MEASUREMENT OF SURFACES WITH DIFFRACTIVE OPTICS AT GRAZING INCIDENCE
摘要
申请公布号	EP0804712(B1)	申请公布日期	2002.04.10
申请号	EP19960903557	申请日期	1996.01.18
申请人	TROPEL CORPORATION	发明人	BRUNING, JOHN, H.
分类号	G01B9/02;G01B11/24;G02B5/18;(IPC1-7):G01B9/02	主分类号	G01B9/02
代理机构		代理人
主权项
地址

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