| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage device capable of miniaturizing a vacuum chamber by minimizing a driving mechanism-related part in the vacuum chamber. SOLUTION: An X guide mechanism and a Y guide mechanism capable of moving movable rods 1X and 1Y in the X direction and the Y direction are respectively arranged in mutually opposed two pairs of positions on the outside adjacent to the side surface of the vacuum chamber 10. An X actuator and a Y actuator for driving the movable rods in the X axis direction and the Y axis direction are respectively arranged in the X guide mechanism and the Y guide mechanism. The X guide mechanism and the Y guide mechanism respectively house a central part of the movable rods 1X and 1Y in an airtight state, and have vacuum chamber introducing chambers 6X and 6Y communicating with the vacuum chamber 10, and a stage and the movable rods 1X and 1Y are connected by a common X connecting a shaft member at a right angle to the X axis direction and a Y connecting shaft member at a right angle to the Y axis direction via the communicating part. |
