| 摘要 |
PROBLEM TO BE SOLVED: To provide a small-sized and sensitive pressure detector capable of precisely detecting an external pressure without dispersion. SOLUTION: This package for pressure detector comprises a substantially square plate-like insulating base 1 having a mount part 1b for mounting a semiconductor element 3 on one main surface and an electrostatic capacitance forming first electrode 7 fixed to the center of the other main surface; a frame 1c with a circular inner circumference and a substantially square outer circumference, which is bonded to the other main surface circumferential part of the insulating base 1 so as to enclose the first electrode 7; and a substantially octagonal plate-like insulating plate 2 having, on one main surface, an electrostatic capacitance forming substantially circular second electrode 9 opposed to the first electrode 7 in the center part and blazed onto the frame 1c in the circumferential part, and mounted on the frame 1c in a flexible state so as to form a sealed space with the insulating base 1.
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