| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring apparatus for planarity, etc., which can measure the position of the pin or the like of a chip by an absolute flat (planar) reference plane. SOLUTION: The measuring apparatus is composed of an optically transparent plane plate 7, which is installed in parallel with the horizontal movement plane of a photosensor 5 and the flat (planar) reference plane 8 which is composed of the outer side face of the plane plate 7, on which a specimen 3 is placed directly and which is horizontal to the horizontal movement plane of the photosensor 5. The transmission characteristic of the plane plate 7 is set, in such a way that a part of the beam of specific light 2 to be transmitted through the plane plate 7 is reflected by the reference plane 8, that a first beam of reflected light which can be sensed by the photosensor 5 is obtained, that a beam of the specific light 2 which has been transmitted through the plane plate 7 is reflected by the specimen 3, so as to be returned and transmitted through the planar plate 7 and that a second beam of reflected light which can be sensed by the photosensor 5 is obtained.
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